The facility serves faculty, students, and external collaborators across electronics, photonics, MEMS, materials science, and emerging nanotechnologies. In addition to enabling cutting-edge research, the cleanroom provides hands-on training with industry-relevant tools, preparing users for careers in semiconductor manufacturing and advanced research environments.
Explore Our Capabilities
Lithography and Patterning
Karl Suss MJB4 mask aligner for high-precision, mask-based photolithography
Maskless Aligner MLA 150 for flexible and cost-effective rapid prototyping
Elionix ELS-ORCA electron-beam lithography system for sub-100 nm patterning
Complete photoresist processing infrastructure including spin coaters, hot plates, developers, and inspection stations
Thin-Film Deposition
Electron-beam and thermal evaporation systems for high-purity metal films
Plasma-Enhanced Atomic Layer Deposition (PEALD) for conformal, angstrom-level thin films supporting electronic and photonic devices
Etching and Surface Processing
SAMCO RIE-10NR for conventional, fluorine-based reactive ion etching
SAMCO RIE-400iP load-lock ICP-RIE system enabling high-density, chlorine-based plasma processing
SAMCO XeF₂ (VPE-4F) etcher for selective, isotropic, damage-free silicon and 2D materials etching
Acid- and base-compatible wet chemical etching stations
Plasma cleaning and surface treatment systems for resist stripping and surface activation
Metrology and Characterization
Optical microscopy for process inspection
DekTak profilometer for film thickness and step height measurements
Ellipsometer for thin-film optical characterization
Atomic Force Microscopy (AFM) for nanoscale surface analysis
Device Packaging and Back-End Processing
Digital thermosonic multipurpose wire bonder for electrical interconnection
DISCO automatic dicing saw for precise die singulation
Facility Access and User Support
Access is managed through a structured training and certification program designed to ensure safe operation, consistent process quality, and long-term equipment reliability. Contact our cleanroom manager here for more details on training and certification.
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